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Break through the "strangling" bottleneck and contribute to the national "14th Five-Year Plan" strategy
As the core of the third-generation semiconductor, the manufacturing technology of silicon carbide (SiC) chips has always been at the forefront of industrial development. And the high-end cleaning equipment has long been monopolized by Japanese and American manufacturers, which is a typical "blocker" in the domestic industrial chain. In response to the national "15th Five-Year Plan" call for enhancing the production capacity of SiC high-end chips and achieving independent control of the industrial chain, Yangfan Semiconductor regards domestication as its responsibility. The 12-inch RCA scrubbing and cleaning integrated machine that was delivered this time has passed the feasibility verification of the experimental line and has successfully broken through the technical barriers, filling the industry gap and leading the world in providing core equipment support for the high-end manufacturing and large-scale production of the SiC entire industrial chain. With this new machine, the innovation of this new model has led the domestic high-end SiC-specific equipment to embark on a new journey. Currently, the leading enterprises in the SiC field are the main customers. In the 12-inch SiC processing line part, the leading enterprises also recognize the design concept and process results of this RCA scrubbing and cleaning integrated machine and provide support for the entire line cleaning machine. This is trust in Yangfan Semiconductor and also the power that supports us to continuously innovate and move forward.
Core Technology: Precise Internal Control and Intelligent Networking
The equipment delivered this time demonstrates Yangfan Semiconductor's profound expertise in advanced semiconductor cleaning processes:
The high hardness of SiC materials and their unique surface properties make it difficult to remove the particles and metal ions on the surface. This innovative technology has broken through the technical bottleneck and led the industry in providing professional and advanced cleaning process solutions, with a 12-inch fully compatible manufacturing process.
The high-precision cycle control features real-time parameter monitoring and internal adjustment capabilities, ensuring the ultimate stability of the cleaning process.
Fully support the SECS/GEM network connection function, and the intelligent overall line connection helps customers build an automated and digital "future factory".
From the basic design to the core manufacturing, it possesses complete independent intellectual property rights. This breaks the foreign technological monopoly and ensures the security of the customer's supply chain.
Set sail for a long voyage and deeply cultivate the fertile land of technology
The successful delivery of this RCA cleaning and washing machine demonstrates that the Rongfan Semiconductor R&D team - a group of elites who have previously worked for leading global semiconductor companies - possess the professional capabilities to address the specific requirements of wide bandgap semiconductors. We are committed to technology with a pragmatic attitude and serve customers with a dedicated spirit, meeting all kinds of high-end customized needs.
As a new and prominent force in China's semiconductor equipment sector, Yangfan Semiconductor will continue to uphold the craftsmanship spirit of "taking one step at a time", while simultaneously strengthening its presence in the domestic market and actively expanding its reach to the international stage. It aims to contribute Chinese wisdom to the diversification and high-quality development of the global semiconductor industry chain.
Yangfan Semiconductor Leads the Green Transformation: RCA Cleaning and Washing Machine Re-defines the New Benchmark for Semiconductor ESG Standards
On the path of striving for outstanding manufacturing capabilities, Silicar Semiconductor has always been committed to integrating environmental protection concepts with technological innovation. Its RCA cleaning and washing machine not only demonstrates outstanding equipment manufacturing capabilities, but also has delivered an extremely impressive report card in the ESG (Environment, Society and Governance) field, becoming a crucial driver for the semiconductor manufacturing industry to move towards sustainable development.
Outstanding performance in resource optimization
Through design innovation, the RCA washing and scrubbing machine has achieved a leapfrog improvement in resource conservation and waste reduction efficiency. Compared with traditional equipment, the performance data is as follows:
|
Project |
Savings/Reduction Ratio |
|
Cleanroom space occupancy |
Reduce by 60% |
|
Chemical substances and electricity consumption |
Save more than 50% |
|
DI pure water usage volume |
Save over 80% |
|
Amount of waste liquid generated |
Reduce by more than 55% |
|
Factory management system construction cost |
Significantly and substantially reduced |
This is not merely about cost optimization; it is also about demonstrating a deep commitment to the Earth's resources. By reducing energy consumption and minimizing carbon footprint, we assist our clients in increasing production capacity while achieving even more stringent carbon reduction targets.
Yangfan Semiconductor will continue to focus on technological innovation, based on its existing foundation, and constantly advance towards higher-end manufacturing processes. It is committed to becoming a global leading company in high-end semiconductor equipment and materials, specializing in the processing of wide bandgap semiconductor materials and silicon-based semiconductor cleaning process solutions. It is also synchronously developing core components such as silicon wafers and silicon components, and building an integrated industrial capability of materials, components and equipment.
Regarding us
Yangfan Semiconductor Technology was established in March 2018. As a national high-tech enterprise and a specialized, innovative, and high-quality small and medium-sized enterprise in Jiangsu Province, it has established a comprehensive product matrix covering the processing of first-generation to fourth-generation semiconductor materials: single-chip cleaning machines, RCA cleaning and polishing integrated machines, polishing/thinning integrated machines, topography measurement machines, silicon carbide automated seed crystal bonding machines, and magnetron single-crystal furnaces. The RCA cleaning integrated machine has the most diverse application scenarios. It can be widely used in cleaning after each process of substrate processing, post-epitaxy cleaning, and multiple cleaning steps before and after the chip process.
The company has obtained certifications such as ISO9001 Quality Management System, ISO14001 Environmental Management System, and ISO45001 Occupational Health Management System. The company possesses a number of its own core technologies and has applied for and received 100 patents, among which 88 have been authorized and it holds 16 software copyrights.
Yangfan Semiconductor possesses the only full-line semiconductor substrate processing shared pilot platform in China, which can provide open-ended technical research and verification services. The fully controlled experimental line covering the entire process from ingot rolling, wire cutting, grinding, polishing to the final cleaning and testing in a hundred-grade cleanroom ensures that every factory-provided equipment has undergone strict mass production-level verification.