Our company has built a dedicated R&D and experimental line for cleaning equipment. This platform is a professional innovation carrier developed to meet the R&D and production requirements of cleaning equipment. It deeply integrates three core capabilities: process processing, precision measurement, and performance verification. It enables full-process technical verification and data traceability of cleaning equipment from technical pre-research to product finalization, providing critical support for equipment technological iteration and upgrading, performance parameter optimization, and core consumable adaptation verification.
The experimental R&D line covers a total area of 2,500 square meters, including 200 square meters of Class 10 clean area, 500 square meters of Class 100 clean area, and 1,000 square meters of Class 1000 clean area. The spatial layout strictly complies with high-end cleaning equipment R&D standards. The experimental line is divided into three functional modules: process processing zone, precision measurement zone, and data analysis zone. It is equipped with a full-chain process system covering pre-treatment, core processing, and post-treatment, as well as multi-dimensional precision measuring instruments including topography characterization, composition analysis, stress detection, and defect identification. It has established an integrated closed-loop R&D system of "processing – inspection – analysis – optimization", laying a solid foundation for the efficient R&D and quality assurance of cleaning equipment.
Process Processing Equipment
Lapping equipment
Thinning equipment
Integrated photoresist coating, ceramic disc mounting and cleaning equipment
Polishing equipment
Single-wafer pre-cleaning machine
Single-wafer final cleaning machine
Precision Measuring Instruments
Atomic Force Microscope (AFM)
Defect inspection tool – Candela® 8520
Wafer surface metal analyzer – ICP-MS
Large field-of-view microscope
High-intensity light darkroom
Wafer surface topography measuring instrument
Edge profiler
Stress measuring instrument
Electron microscope, etc.
Relying on its complete equipment configuration, this R&D line has three core technical capabilities to comprehensively support cleaning equipment R&D:
Multi-dimensional process analysis capability: cleaning effect analysis, process compatibility analysis, and damage risk analysis.
Equipment performance verification capability: new equipment prototype verification, key component performance testing, and stability & reliability testing.
Consumable evaluation capability: cleaning medium evaluation, consumable life evaluation, and environmentally friendly consumable verification.
Application Value
Accelerate technological iteration, ensure product quality, and reduce market risks.
With complete equipment and strong multi-dimensional technical capabilities, this experimental R&D line has become a core supporting platform for the R&D and production of cleaning equipment. In the future, we will continue to focus on the technological innovation needs of cleaning equipment, continuously improve testing capabilities and analysis systems, and provide more professional and efficient R&D services for the industry.