· Independently developed to meet customer requirements, this is a high-efficiency, high-performance cleaning and waxing machine with strong compatibility. It features customized and modular design with flexible configuration.
· Reasonable layout, novel appearance, convenient operation, high accuracy and precision.
· Automatic loading/unloading system and ceramic disk cart with multi-sheet capacity can reduce labor and improve efficiency.
· After ceramic disk cleaning, wax coating, wax spinning, wafer mounting and cooling are completed automatically.
· Closed wax feeding keeps the equipment surface cleaner.
· The heating/cooling plate adopts precise heating and automatic cooling system for accurate temperature control. One-to-one (one-to-two, one-to-three, one-to-four) configuration can be customized according to customer requirements.
Product Performance
| Specification / Model | Ceramic Disk Wafer Mounting and Cleaning Integrated Machine |
| Ceramic Disk | Ø485×15T |
| Wafer Mounting Size | 2"~8"wafer process |
| Machine Dimensions | 2700(W)*9700(L)*2300(H) |
| Machine Power Supply | 380V 3P 50/60Hz 65KW |
Application Fields
Silicon, Sapphire, Silicon Carbide (SiC), Compound Semiconductors